A post-fabrication selective magnetic annealing technique in standard MEMS processes
نویسندگان
چکیده
منابع مشابه
A Post-Fabrication Selective Magnetic Annealing Technique in Standard MEMS Processes
A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspend...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2016
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4971262